In a new twist, researchers from Tsapatsis’s lab have teamed up with the Fairbrother Research Group at Johns Hopkins University. Collectively, they have done great work in the microchip sphere. They have identified new metal-organic resists that can effectively accommodate B-EUV radiation, which has the potential to create details smaller than the current industry standard of 10 nanometers. This incredible progress has the potential to change the future of microchip production.
The team has focused their work on the even newer B-EUV lithography, a process that promises to change how microchips are made. They found that using imidazole-based metal-organic resists was an effective way to deposit materials from solution onto silicon wafers. This technique provided them with unprecedented control over thickness, down to nanometer precision. This breakthrough was a critical step along the path to ever-tinier microchip features.
Overcoming Production Challenges
A big part of the challenge in making smaller and smaller microchip features is identifying the proper process. This process should allow for the fast, accurate irradiation of materials during the production line. The next generation lasers required to imprint these small formats are already developed. Yet researchers are finding it increasingly difficult to create materials and processes that work in harmony.
Metal-organic resists introduce thrilling new opportunities for creative couplings. These developments maximize light absorption efficiency on- and off-axis during the lithography process. Further, according to Tsapatsis, there are likely hundreds of compounds in this chemistry as compared to at least 10 different available metals. Scientists are able to test a wide range of possibilities. This approach enables them to mix diverse materials and custom optimize them especially for the B-EUV radiation.
This innovation in material science is a game changing accomplishment in the ongoing effort to develop smaller, more powerful and energy efficient microchips. The researchers have the ability to carefully tune both the metal and imidazole constituent. This new capability should improve the selectivity of follow-up reactions and maximize overall yield.
The Future of Microchip Manufacturing
B-EUV radiation is set to become a key player in the advanced manufacturing ecosystem over the next ten years. Companies in the semiconductor sector have already shared roadmaps, laying out their goals for the next 10-20 years. These plans show the acute need for innovation. As demand continues to climb, the industry will need to make increasingly smaller and more powerful microchips.
The work being done by Tsapatsis’s lab and the Fairbrother Research Group directly furthers these industry objectives. If successful with their new pairings of metals and organics, manufacturers will soon be able to produce microchips that defy the current state of the art. The current experimentation with new metals and organics is a promising first step at taking a long view to meet challenges down the road with microchip technology.
Additionally, the publication of the related research article, DOI: 10.1038/s44286-025-00273-z, provides further insights into this groundbreaking work and its implications for the semiconductor industry. Academics and chemical manufacturers alike are exploring the reactive chemistry of B-EUV lithography. Their efforts are helping to lead America into a new era of microchip manufacturing.
Implications for Innovation and Development
This research goes far beyond smaller chip sizes. Tsapatsis found that modifying the metal and imidazole parts increases light absorption efficiency. This switcheroo additionally manipulates the chemistry in the reactions that occur afterward. This adaptability will be vital as manufacturers aim to meet future demands while maintaining high standards of precision and quality.
The vibrant and ongoing collaboration between research institutions and industry stakeholders serves as a poignant reminder that we all share the same vision for the future of microchips. Collaboration encourages creativity. Partnerships encourage risk-taking and innovation. This speeds up the discovery of new materials and processes, opening doors to game-changing changes to electronics.
